Products
Solar
Horizontal In-Line System
개요
- SuVAS™ H-Series는 Back Electrode, CIG Precursor 그리고 TCO (Transparent Conductive Oxide)
박막을 증착하는 설비이며, Several Glass Loading Technology와 Cylindrical Cathode로 작동되며
높은 생산성 및 향상된 타겟 사용률을 제공함
특징
- Horizontal in-line type system
Minimizing particles inside the chamber
Simplified distributing using non-carrier transfer system
Maximizing the efficiency of target usage and improving quality of thin-film by target rotation and moving the magnet on the cathode part
Several sheets of glass loading technology and cylindrical cathodes
High throughput and extended target utilization rate.
사양
Applicable Substrate Size
Max Gen 8th Substrate
Tact Time
Within 60sec
Target Materials
Ag, Al, Al2O3, AlNd, AZO, CIGS, Cr, Cu, CuGa, CuIn, GZO, IGZO, In, ITO, IZO, Mo, MoTi, MoW, Ni, Se, SiO2, TiO2, ZnO
Power Source
DC, Pulsed DC or MF
Thickness Uniformity
Within ±5%
Sheet Resistance Uniformity
Within ±12%
Heating Temp
Max 250℃ (Based on substrate temp.)
Heating Temp. Uniformity
Within ±15℃