Products
Solar
Furnace System
개요
- 본 장비는 Sputtering으로 증착된 CIG Precursor를 고온 환경에서 Sulfur와 Selenium을 공급하여 결정질 CIGSSe 광흡수층으로 만드는 장치이며,
40매 이상의 기판 Glass를 일괄 열처리할 수 있음
특징
- Batch System
No glass Damage or deformation(Warp free technology)
Safety Protocols for Hydrogen Selenide (H2Se) and Hydrogen Sulfide (H2S)
Complete Chamber sealing for ambient control & safety
Heater design to control the uniformity of temperature
사양
Application
Thermal process on glass substrate
(Sulfurization after Selenization)
Substrate Size (㎜)
1,650 × 650 (Max t=3),
Max 48panels
Process Tube Size (㎜)
Φ 1,000(D) × 2,000(L)
Heating Temperature (℃)
Max 600
Temperature Uniformity (%)
Within ± 5
Other
Forced convection type