Products > OLED System

개요

OEC Series는 H2O와 O2의 산화 방지를 위해 플라즈마 처리된 cover-glass와 유기-재료의 코팅 기판 캡슐에 의해 OLED의 생산 공정에 사용하는 장비

특징

- 구성 : Octagonal Cluster Chamber (including vaccum transfer robot), Hexagonal Glove Box (including ATM transfer robot), Plasma treating machine, Getter attacher, Seal dispenser, UV assembler, and Return Conveyor
- 가스 정화기를 사용하여 챔버 내부의 H2O와 O2 조절
- 이중 양산모드 : 액화 밀폐제를 사용하는 UV 경화 모드와 Ffrit 밀폐제를 사용하는 레이저 sealing 모드
- 진공 부품 : Dry pump + Booster pump

사양

- 대응 기판 크기 : Max 2,940 X 3,370mm (G10.5)
- Ultimate Pressure [Chamber] : ≤8E-3Torr or ≤5E-6Torr (12시간 이내)
- H2O, O2 ppm [N2 Box] : ≤1ppm (4시간 이내)
- Laminar Flow [N2 Box] : 기류 속도 0.3~1m/sec
- Leak Rate [N2 Box] : 0Vol%/hour<title><p> </p><style type="text/css"> <style><p> </p><p> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;">기판 크기 </span> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">: 730mm X 460mm</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">Tact Time : 4min</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">Cover Material : Glass</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">No. of Substrate Loading : 48pcs. (24pcs. X 2 Stocker)</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">Process Circumstance : H2O < 1ppm, O2 < 10ppm</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">Encapsulation Accuracy : ± 7</span> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;mso-hansi-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">㎛ </span> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;">이내</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">UV </span> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;">균일도 </span> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">: ± 5% </span> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;">이내 </span> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">(based on substrate area)</span></p><p> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">Glass </span> <span style="font-family:맑은 고딕;mso-fareast-font-family:맑은 고딕;">이송 방법 </span> <span lang="EN-US" style="mso-fareast-font-family:맑은 고딕;font-family:맑은 고딕;mso-ascii-font-family:맑은 고딕;mso-font-width:100%;letter-spacing:0pt;mso-text-raise:0pt;">: Robot and Magnetic Roller</span></p><title><title><title><p><br></p><title><title><p><br></p></div><p><br></p></li> </ul> </div> </div> </div> <div class="pro_detail_table row animate" data-animate="fadeInUp" data-duration="1s" data-delay="0.2s" data-offset="150"> </div> <div class="tac"> <a href="?menu_code=106&menuCode=" class="btn btn-lg btn-board-01">목록으로</a> </div> </div> </div> </div> </div>  <script> $('.animate').scrolla({ mobile: false, // disable animation on mobiles once: true // only once animation play on scroll }); </script>  </div> </section>  </main>   <footer id="footer" class="midnight-blue"> <div class="foot_top_wrap"> <div class="container"> <div class="row footer_mu"> <div class="col-sm-12"> <ul class="">  <li class="line" ><a href="/?menu_code=119">이메일무단수집거부</a></li> <li class="line" ><a href="/?menu_code=118">개인정보보호취급방침</a></li> <li class=""><a href="/?menu_code=120">사이트맵</a></li> </ul> </div> </div> </div> </div> <div class="container"> <address class="row col-sm-12">  <strong>(주)아바코</strong>주소: 대구광역시 달서구 성서4차첨단로 160-7 <span>Tel. 053)583-8150</span><span>Fax. 053)588-9209</span><br/> <cite>Copyright(C) 2019 AVACO CO.,LTD. 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